Semiconductor Equipment Maintenance Supervisor

Supports a 3-inch InP/GaAs compound-semiconductor fab and an 8-inch silicon fab.

Originally posted 5 November 2026 by the employer.

About the role

The Semiconductor Equipment Maintenance Supervisor is a hands-on working supervisor responsible for the safe, reliable, and compliant maintenance of semiconductor processing equipment supporting a 3-inch indium phosphide/gallium arsenide (InP/GaAs) compound-semiconductor fab and an 8-inch silicon fab. This role leads equipment maintenance technicians and service providers while directly assisting with diagnostics, preventive and corrective maintenance, installations, and tool recovery.

What you'll do

• Direct daily maintenance activities and assist technicians with complex diagnostics, repairs, calibrations, equipment recovery, and safe return-to-production across both fabs.
• Establish shift schedules, priorities, workloads, and on-call coverage while developing technician qualifications and cross-training plans.
• Lead maintenance support for tools spanning epitaxy, wet and dry etch, thin-film deposition, diffusion, ion implantation, photolithography, plating, metrology, wafer thinning, and dicing.
• Support specialized InP/GaAs and 8-inch silicon equipment subsystems including process chambers, gas panels, chemical delivery, vacuum systems, point-of-use abatement, robotics, and safety interlocks.
• Manage work orders, backlog, lockout/tagout, critical spare parts, vendor activities, and maintenance procedures using the site CMMS.
• Lead root-cause analysis, corrective actions, and reliability initiatives to optimize tool uptime, mean time between failures, and mean time to repair.

What you'll need

• Associate degree, technical certificate, military technical training, or equivalent combination of education and relevant semiconductor-equipment experience.
• Typically 7 or more years of progressive experience maintaining semiconductor processing equipment in wafer fabrication or a complex high-technology manufacturing environment.
• Typically 2 or more years of lead, supervisory, or work-coordination experience.
• Demonstrated ability to troubleshoot tools and subsystems involving mechanical assemblies, electrical controls, PLCs, robotics, motion control, RF power, vacuum, pneumatics, and chemical/gas delivery.
• Working knowledge of cleanroom protocols, contamination control, lockout/tagout, hazardous-energy control, and safe maintenance practices for hazardous chemicals and gases.
• Experience utilizing a CMMS for work management, maintenance metrics, calibration records, and spare-parts control, alongside the ability to interpret schematics, P&IDs, and mechanical drawings.

Nice to have

• Bachelor’s degree in engineering, engineering technology, or a related technical field.
• Direct equipment-maintenance experience supporting both compound-semiconductor and silicon wafer fabrication environments.
• Experience maintaining equipment for epitaxy, plasma etch, wet processing, PVD, CVD, PECVD, diffusion furnaces, rapid thermal processing, ion implant, lithography tracks, or steppers.
• Experience with RF generators and matching networks, vacuum systems, servo systems, PLCs, industrial computers, and point-of-use abatement.
• Experience leading tool installations, relocations, upgrades, factory or site acceptance testing, commissioning, and equipment obsolescence programs.
• Knowledge of semiconductor equipment safety and environmental requirements, including applicable SEMI guidance.

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