Vacuum System Engineer - Wilton, CT, United States

Originally posted 2 October 2026 by the employer.

This role focuses on creating contamination-free vacuum environments for EUV lithography machines.

About the role

This role involves enabling EUV lithography by creating contamination-free vacuum environments for advanced semiconductor manufacturing systems. You will play a key role in the Defectivity Module Delivery Unit, focusing on the critical environment within the vacuum reticle modules of EUV lithography machines.

What you'll do

• Model and design gas flow from atmosphere to deep vacuum.
• Select appropriate materials and design cleanliness processes for vacuum-grade performance.
• Translate overall system design into a gas-flow and vacuum architecture that meets system requirements.
• Specify vacuum system components, standards, and procedures, recording them in Technical Product Documentation (TPD).
• Define, model, and execute qualification tests to verify architecture or subsystem functions and requirements.
• Perform analyses and calculations to predict flow architecture or subsystem functionality, including pressure-drop budgeting, flow budgeting, humidification, and gas purity.

What you'll need

• BS degree in a technical field and 5+ years of experience.
• Ability to specify vacuum systems, gas flows, pump-down and vent procedures, and architecture requirements for scanner and test-rig environments.
• Knowledge of molecular and particle cleanliness, surface particulate behavior, vacuum-grade cleanliness, materials compatibility, desorption issues, and contamination troubleshooting.
• Ability to plan and execute tests and DOEs, analyze measurement results, perform pressure-drop and flow budgeting, and use evidence to make practical recommendations.
• Ability to document standards, procedures, requirements, test evidence, and component specifications in Technical Product Documentation.

Nice to have

• Experience with particle transport in flows, rarefied gas flow, plasma physics, electrostatics, surface science, RGA or other vacuum measurement techniques.
• Experience with calculations or simulations for gas-flow and particle transport.
• Experience using modeling or simulation tools to predict gas flow, vacuum performance, contamination transport, or thermal-fluid behavior.

Skills: Vacuum Systems Engineer, gas flow, deep vacuum, cleanliness processes, EUV lithography machines, contamination-free