Semiconductor Equipment Maintenance Supervisor - US-CA-Santa Rosa-Bldg 2, United States

Originally posted 9 October 2026 by the employer.

About the role

This hands-on working supervisor role is responsible for the safe, reliable, and compliant maintenance of semiconductor processing equipment. This position supports a 3-inch indium phosphide/gallium arsenide (InP/GaAs) compound-semiconductor fab and an 8-inch silicon fab.

What you'll do

• Direct daily maintenance activity and assist with complex diagnostics, repairs, calibrations, and equipment recovery.
• Assign priorities, balance workloads, establish shift and on-call coverage, coach technicians, and develop technical capability.
• Lead maintenance support for equipment in epitaxy, wet and dry etch, thin-film deposition, diffusion and thermal processing, ion implantation, photolithography, wafer cleaning, plating, metrology, inspection, wafer thinning, and dicing.
• Develop and execute maintenance plans based on equipment criticality, process risk, and manufacturer guidance.
• Lead structured fault isolation for mechanical, electrical, electronic, software, robotics, motion-control, RF, vacuum, thermal, chemical, gas-delivery, and instrumentation issues.
• Control work orders, backlog, labor planning, lockout/tagout, parts, vendor activities, maintenance procedures, calibration records, and equipment logs through the site CMMS.

What you'll need

• Associate degree, technical certificate, military technical training, or equivalent combination of education and relevant semiconductor-equipment experience.
• 7 or more years of progressive experience maintaining semiconductor processing equipment in wafer fabrication or a similarly complex high-technology manufacturing environment.
• 2 or more years of lead, supervisory, or work-coordination experience.
• Demonstrated ability to troubleshoot process tools and subsystems involving mechanical assemblies, electrical and electronic controls, PLCs, computers, robotics, motion control, RF power, vacuum, pneumatics, temperature control, chemical delivery, gas delivery, sensors, and instrumentation.
• Working knowledge of cleanroom protocols, contamination control, lockout/tagout, hazardous-energy control, and safe maintenance of equipment using hazardous chemicals and gases.
• Experience with CMMS work management, equipment maintenance metrics, calibration, spare-parts control, supplier escalation, technical documentation, and written maintenance procedures.

Nice to have

• Bachelor’s degree in engineering, engineering technology, or a related technical field.
• Direct equipment-maintenance experience in both compound-semiconductor and silicon wafer fabrication.
• Experience supporting epitaxy, plasma etch, wet processing, PVD, CVD, PECVD, diffusion furnaces, rapid thermal processing, ion implant, lithography tracks and steppers, metrology, inspection, plating, wafer thinning, or dicing equipment.
• Experience with process-tool gas panels, chemical-delivery modules, vacuum systems, RF generators and matching networks, robotics, servo systems, PLCs, industrial computers, point-of-use abatement, and equipment safety interlocks.
• Formal training or certification in electrical safety, vacuum technology, controls, robotics, reliability, maintenance management, or hazardous materials.
• Experience leading tool installations, relocations, upgrades, factory or site acceptance testing, commissioning, and equipment lifecycle or obsolescence programs.
• Knowledge of semiconductor equipment safety and environmental requirements, including applicable SEMI guidance and site standards.